SANTA CLARA, CA – Coherent Inc. has released ExciStar XS, a compact excimer laser.
 
The laser measures 649 x 300 x 400 mm, but delivers up to 10mJ/pulse at 193 nm with an energy stability of <2% (1σ), at repetition rates of up to 500 Hz. The use of Almeta XS all metal tube construction, corona preionization, an all solid state pulser and electrostatic dust removal combine to yield a laser tube lifetime of 500 million pulses and an optics lifetime of 100 million pulses.
 
The ExciStar XS can reportedly operate at 157 nm (F₂), 193 nm (ArF), 248 nm (KrF) or 351 nm (XeF). Additionally, the ExciStar XS is RoHS compliant. 

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