XYR-03-01 alignment stage is a high-resolution, high-repeatability x-y-theta stage for wafer alignment, semiconductor handling, laser cutting and drilling.

Linear resolution of x and y axis is 5µm (non-micro-step) or 0.125µm (20 micro-steps per step motor driver in use); repeatability is 1.5µm, and positional accuracy is 5µm. Has 1mm per-turn lead screws and preloaded V-groove and crossed roller bearings.  Linear travel X and Y axes is 50mm x 50mm. 100mm diameter theta stage is driven by 90:1 ratio worm gear. Resolution of theta stage is 0.02Ω (non-micro-step) or 0.001Ω (20 micro-steps per step motor driver in use).  Repeatability is 0.005Ω; positional accuracy is 0.01Ω, and backlash is 0.005Ω. Two-phase stepper motors are standard. Knob for manual adjustments of each axis can be replaced with an incremental encoder for position verification or closed-loop operation. Black anodized aluminum x-y-theta stages can be integrated into new or existing systems. Compatible motion controllers available.

Optimal Engineering Systems
oesincorp.com

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