MILPITAS, CA – KLA Corp. formed KLA Instruments, a group that develops, markets and services measurement and defect inspection systems used primarily by research and development departments in universities and industrial labs.
KLA Instruments offers optical and stylus profilometers, nanoindenters, benchtop film metrology systems and specialized defect inspection systems.
"KLA Instruments has a unique identity within KLA," said Wilbert Odisho, vice president and general manager of KLA Instruments. "Beyond KLA’s core semiconductor process control business, the KLA Instruments group serves a wide range of academic and industrial customers with an even wider range of measurement requirements in industries including biotech and medical devices, optics, displays, batteries and energy technologies. What unifies the systems that comprise KLA Instruments is the delivery of accurate and repeatable measurements."
Brands within KLA Instruments include Tencor stylus profilers, Zeta and Filmetrics optical profilers, Candela defect inspection systems, Filmetrics reflectometers, and Nano Indenter systems from the former Nanomechanics. The systems range from benchtop, manual instruments to fully automated systems with cassette and wafer handling.