PE-50 XL benchtop plasma cleaner includes an implosion-proof rectangular welded aluminum vacuum chamber. Has a chamber working area of 8" x 8" x 4". Standard features included single 5" x 5" horizontal electrode; 125W @ 50 kHz RF generator; precision needle valve flow control 0-25 CC/min; Pirani vacuum gauge 0-1 torr; 5 CFM oxygen service vacuum pump, and a single process sequence. Applications include medical devices, solar cells, printed circuit boards, connectors, MEMs, nanotechnology and wafer-level packaging.
Plasma Etch, www.plasmaetch.com