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MI-9500 Mask Inspection System

Published: 03 June 2009
The Media and Precision Technology Co of Dainippon Screen Mfg Co Ltd has released MI-9500, a mask inspection system. The MI-9500 incorporates an upgraded image processing unit and new digital interpolation technology to improve inspection of photomasks for fine-line circuit boards with line widths as low as 7.5µm. A new defect detection algorithm improves the MI-9500’s ability to locate tiny defects. The MI-9500 uses an open/short pattern matching inspection technique to improve detection of opens and shorts. The unit is suitable for use in a clean room.


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