SAN JOSE – Worldwide semiconductor manufacturing equipment orders grew 18% year-over-year during the first quarter to $11.08 billion.

New orders fell 11% sequentially, however, as they were unable to sustain the record pace of 2010, SEMI reported.

Billings reached $12 billion in the first quarter, up 61% year-over-year, and up 1% sequentially.

Data are gathered with the Semiconductor Equipment Association of Japan from more than 100 global equipment companies that provide data on a monthly basis.