MINNEAPOLIS -- Rudolph Technologies, Inc. has been awarded a favorable verdict in its patent infringement suit against Camtek, Ltd.

A jury determined that all models of Camtek's Falcon inspection system infringe on Rudolph's US patent no. 6,826,298 – “Automated Wafer Defect Inspection System and a Process of Performing Such Inspection.” The patent covers the continuous inspection of wafers using strobing illumination.

The jury rejected Camtek’s claims that the patent was invalid and awarded Rudolph $6.8 million.

Rudolph plans to pursue intellectual property protection for this technology outside the U.S.