S3 10µm Substrate Tester has four freely movable test heads and a test rate of 100 measurements per sec. for high-speed open and short tests. Optically aligns test sample, correlating shrinkage and offset of finished product with testing data and adjusts automatically. Has 5Mp color camera with resolution of 1.2µm, good for positioning accuracy of +/-1.5µm. Contacting pressure of micro needle adjusts from 0.3g to 2.5g. Maximum test area 310 x 300mm (12.2" x 11.8").

atg Luther & Maelzer, www.atg-lm.com