Ucamco LeVina direct imager combines imaging heads equipped with Screen's proprietary GLVTM optical engine and laser control technologies.

Is specifically designed for mass production and enables direct imaging of substrates at 2/2μm L/S resolution. Reported throughput us 100 subtsrates per hour with L/S of 5/5µm. Multi-head system and stage capable of moving at up to 480mm/sec. Alignment marks are read during scanning, for high speed regardless of the number of marks in the scanning direction (can also be automated). Light source uses laser diodes to reduce operating costs. Sources of particle generation have been blocked and the system is equipped with airflow control technologies to reduce contamination inside the system, helping to improve yields.

Ucamco NV

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