SANTA CLARA, CA
– Coherent Inc.
has released ExciStar XS, a compact excimer laser.
The laser measures 649 x 300 x 400 mm, but delivers up to 10mJ/pulse at 193 nm with an energy stability of <2% (1σ), at repetition rates of up to 500 Hz. The use of Almeta XS all metal tube construction, corona preionization, an all solid state pulser and electrostatic dust removal combine to yield a laser tube lifetime of 500 million pulses and an optics lifetime of 100 million pulses.
The ExciStar XS can reportedly operate at 157 nm (F2
), 193 nm (ArF), 248 nm (KrF) or 351 nm (XeF). Additionally, the ExciStar XS is RoHS compliant.